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一、前言纯铝表面易于形成致密的、具有良好耐蚀性的氧化膜,但无法用湿式电镀法在工件表面上获得铝耐蚀层.离子镀的出现使铝镀层作为优异的金属材料防护层成为可能. 离子镀是D.M.Mattox于1964年提出的,被镀工件接数千伏负偏压,沉积室的真空度保持在10~(-2)～10~(-3)乇.铝镀层的沉积是
I. INTRODUCTION The pure aluminum surface is easy to form a dense oxide film with good corrosion resistance, but the aluminum corrosion layer can not be obtained on the surface of the workpiece by the wet plating method. The appearance of ion plating makes the aluminum plating as an excellent metal material protection layer Ion plating is proposed by DMMattox in 1964. The workpiece to be plated is connected to a negative bias of several kilovolts and the vacuum degree of the deposition chamber is maintained at 10 -2 to 10 -3 Torr. Deposition is