分析了现有的ＡＦＭ力传感器的工艺特点及问题。在此基础上研究用ＫＯＨ溶液两步法Ｐ＋自停止腐蚀制作厚度精确可控的单晶硅悬臂梁；以ＳｉＯ２为掩模，ＳＦ６刻蚀硅，用ＲＩＥ与各向同性湿法化学腐蚀相结合使悬臂梁探针一次成形和用湿法腐蚀锐化探针，针尖半径约５０ｎｍ。制定了适于批量生产的ＡＦＭ力传感器加工工艺。 The characteristics and problems of the existing AFM force sensor are analyzed. Based on this, the single-crystal silicon cantilever with precise and controllable thickness was fabricated by the two-step P + self-stop corrosion method using KOH solution. With SiO2 as the mask, SF6 was etched by using the combination of RIE and isotropic wet chemical etching Shaping the cantilever probe once and sharpening the probe with a wet etch, the tip radius is about 50 nm. Developed suitable for mass production of AFM force sensor processing technology.