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薄膜应力可用ｘ射线掠射法测量，２θ－ｓｉｎ￣２φ失去线性时，采用小角掠射，有可能使２θ－ｓｉｎ￣２φ恢复直线，并由斜率计算应力；２θ－ｓｉｎ￣２φ维持线性时，依次改变掠射角，可望对内应力沿膜厚分布做出评估。
Thin film stress can be measured by x-ray grazing method. When 2θ-sin ~ 2φ loses linearity, small angle glancing may make it possible to restore 2θ-sin ~ 2φ to a straight line and calculate stress from slope. When 2θ-sin ~ 2φ maintains linearity, Followed by changes in grazing angle, is expected to assess the distribution of internal stress along the film thickness.