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简要回顾了二次离子质谱学的形成和发展 ,从原始概念出发概括分析了学科的特点 ,据此评述了其领域的拓宽和现状。结合近 5年来国内外的最新进展 ,以微电子学和光电子学为重点 ,兼顾生物和医学、地质和天体学科、纳米科技和环境监测等领域 ,讨论了其前沿在世纪之交对SIMS提出的挑战 ,介绍了定量分析和仪器的发展现状。有重点地结合一些实例 ,包括我国的一些实例展开了讨论
A brief review of the formation and development of secondary ion mass spectrometry, starting from the original concept of a general analysis of the characteristics of the discipline, accordingly commented on the field of broadening and current status. Combining with the latest progress both at home and abroad in recent 5 years, this paper discusses the advances of SIMS at the turn of the century in the fields of biology and medicine, geology and celestial subjects, nanotechnology and environmental monitoring, focusing on microelectronics and optoelectronics. Challenge, introduced the quantitative analysis and the status quo of the instrument. Some examples are discussed with emphasis, including some examples in our country