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硬质膜由于具有良好的耐磨、耐蚀和耐热等特点,所以在航天、化工和机械等领域获得了日益广泛的应用,而硬质膜的组成和制备工艺也随之得到不断发展.本文综述了TiN类硬质膜的应用和制备硬质膜常用的气相沉积方法、工艺参数及其优缺点.阐明了制备工艺正向着以三束(电子束、离子束和激光束)为基础多种工艺复合的方向发展.而硬质膜正向着多元膜、梯度膜和纳米复合膜方向发展.
Due to its good wear-resistant, corrosion-resistant and heat-resistant properties, the hard film has been widely used in aerospace, chemical and mechanical fields. The composition and the preparation process of the hard film have also been continuously evolving. In this paper, the application of TiN hard films and the common vapor deposition methods, process parameters and advantages and disadvantages of hard films are reviewed, and the preparation process is based on three beams (electron beam, ion beam and laser beam) The direction of the process of compound development, while the rigid membrane is moving toward the multi-membered, gradient membrane and nanocomposite membrane direction.