The paper proposes a novel nano-patterning method called electrically induced nanostructuring,where an external electric field,insteadof the external mechanical pressure,is applied to generate an electrohydrodynamic force acting on the polymer-air interface to drive the polymer’s flow into the mold cavities. This electrically induced nanostructuring method no longer requires a large mechanical pressure externally applied for actuating the polymer filling in the mold cavities,and has been used to successfully fabricate micro/nano pillar arrays of a high aspect ratio (up to 10),which have been usually considered to be“difficult to fabricate”by conventional molding or nanoimprinting processes. The paper proposes a novel nano-patterning method called electrically induced nanostructuring, where an external electric field, instead of the external mechanical pressure, is applied to generate an electrohydrodynamic force acting on the polymer-air interface to drive the polymer’s flow into the mold cavities. This electrically-induced nanostructuring method no longer requires a large mechanical pressure externally applied for actuating the polymer filling in the mold cavities, and has been used to successfully fabricate micro-mesh arrays of a high aspect ratio (up to 10), which have been usually considered to be “difficult to fabricate ” by conventional molding or nanoimprinting processes.