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着重介绍“全无油超高真空超纯表面制备和分析设备”、“分子束外延设备”“空间材料二次电子发射测试设备”的设计和调试过程中的一些体会.其中包括全无油超高真空机组的设计和方案比较;整机的结构布局形式;真空机组的布局以及主、辅泵的匹配.较为重点的叙述了升华泵的设计.这几种全无油超高真空设备的极限压力范围为4×10~(-8)—6×10~(-8)帕;真空机组的极限压力为2×10~(-8)—3×10~(-8)帕.
The author mainly introduces some experiences in the process of design and debugging of “all oil-free ultra-high vacuum ultrapure surface preparation and analysis equipment”, “molecular beam epitaxy equipment” and “space material secondary electron emission testing equipment” High vacuum unit design and program comparison; machine structure layout; vacuum unit layout and the main and auxiliary pump matching. The emphasis is on the sublimation pump design. These types of oil-free ultra-high vacuum equipment limit The pressure range is 4 × 10 -8 -6 × 10 -8 Pa. The ultimate pressure of the vacuum unit is 2 × 10 -8 -8 × 10 -8 Pa.