【摘 要】
：
This study investigated the hydrogenation of silicon tetrachloride(SiCl4)in microwave plasma.A new launcher of argon(Ar)and hydrogen(H2)plasma was introduced to
【机 构】
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State Key Laboratory of Multiphase Complex Systems,Institute of Process Engineering,Chinese Academy
【出 处】
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Chinese Journal of Chemical Engineering
论文部分内容阅读
This study investigated the hydrogenation of silicon tetrachloride(SiCl4)in microwave plasma.A new launcher of argon(Ar)and hydrogen(H2)plasma was introduced to produce a non-thermodynamic equilibrium activation plasma.The plasma state exhibited a characteristic temperature related to the equilibrium constant,which was termed“Reactive Temperature”in this study.Thus,the hydrogenation of SiCl4in the plasma could easily be handled with high conversion ratio and very high selectivity to trichlorosilane(SiHCl3).The effects of SiCl4/Ar and H2/Ar ratios on the conversion were also investigated using a mathematical model developed to determine the optimum experimental parameters.The highest hydrogenation conversion ratio was produced at a H2/SiCl4molar ratio of 1,with mixtures of SiCl4and H2to Ar molar ratio of 1.2 to 1.4.In this plasma,the special system pressure and incident power were required for the highest energy efficiency of hydrogenating SiCl4,while the optimum system pressure varies from 26.6 to 40 kPa depending on input power,and the optimum feed gas(H2and SiCl4)molar energy input was about 350 kJ·mol?1.
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