自80年代以来,人造金刚石低压气相生长的研究取得了很大突破,已先后发展了热丝CVD、微波等离子体CVD、乙炔燃烧火焰、直流等离子体炬和激光辐射淀积等多种制备技术。与此同时,对金刚石气相生长的理论研究也十分引人注目。近年来,作者之一提出的非平衡热力学耦合模型从热力学上合理地解释了金刚石在低压气相中的稳定生长。最近我们利用该模型已成功地计算了金刚石气相生长的C-H-O三元相图以及用CH_4/H_2和C_2H_2/O_2 Since the 1980s, a great breakthrough has been made in the research of low pressure vapor phase growth of artificial diamond. Many technologies have been developed such as hot filament CVD, microwave plasma CVD, acetylene combustion flame, DC plasma torch and laser radiation deposition. At the same time, the theoretical study of diamond vapor growth is also very noticeable. In recent years, the non-equilibrium thermodynamic coupling model proposed by one of the authors has explained thermodynamically and reasonably the steady growth of diamond in the low-pressure gas phase. Recently, we have used this model to successfully calculate the C-H-O ternary phase diagram of diamond vapor phase growth, as well as CH_4 / H_2 and C_2H_2 / O_2