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为模拟空间环境中低能粒子对航天产品的侵蚀效应,研制了一台质子束注入系统,要求质子能量在1～50keV连续可调,流强0～6μA可调,束斑φ20～150mm连续可调,束流均匀度在φ20～150mm束斑大小下均匀度均优于90%,质子纯度好于98%,同时要求系统能够长时间持续工作。注入系统的基本结构如图1所示,其主体由离子源、前透镜、速度选择器、后透镜、偏转器和X、Y向扫描器等元件组成。
In order to simulate the erosion effect of low energy particles on aerospace products in space environment, a proton beam injection system was developed, which requires that the proton energy is continuously adjustable from 1 to 50 keV, the flow intensity is adjustable from 0 to 6 μA and the beam spot φ20 to 150 mm is continuously adjustable , Uniformity of beam uniformity is better than 90% under φ20 ~ 150mm beam spot size, and the proton purity is better than 98%. At the same time, the system is required to continue working for a long time. The basic structure of the injection system shown in Figure 1, the main body from the ion source, the front lens, the speed selector, the rear lens, deflector and X, Y scanners and other components.