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CW-1型真空度稳定仪能把被控容器内的压强控制在1托～10~(-6)托之间,随需要连续可调。当抽空系统确定后,配以适当流量的压电晶体阀和控制增益,仪器经一次调好后,外界压强在三个数量级内变化,可保证被控压强的动态偏差值小于±10％,稳态偏差小于±5％。当抽空系统的抽速发生变化时,该仪器同样能使被控容器内的压强稳定。CW-1型真空度稳定仪可以单独作测量仪器用,其量限范围是1托～1×10~(-8)托,测量误差小于±30％。仪表读数用对数刻度,分两个量程,自动切换量程。本文简要地介绍了该仪器的工作原理、设计方法、主要电路、性能参数和实验结果。
CW-1-type vacuum stabilizer can control the pressure inside the container is controlled between 1 torr ~ 10 ~ (-6) Torr, continuously adjustable as needed. When the evacuation system is confirmed, coupled with the appropriate flow of piezoelectric crystal valve and control gain, the instrument after a good tune, the external pressure changes within three orders of magnitude, to ensure that the controlled pressure of the dynamic deviation of less than ± 10%, stable The state deviation is less than ± 5%. When the evacuation system pumping speed changes, the instrument can also make the pressure inside the controlled container is stable. CW-1 vacuum stabilizer can be used alone as a measuring instrument, the range limit is 1 torr ~ 1 × 10 -8 Torr, the measurement error is less than ± 30%. Instrument readings with a logarithmic scale, divided into two ranges, automatically switch range. This article briefly introduces the working principle of the instrument, design methods, the main circuit, performance parameters and experimental results.