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阐述了InSb凝视红外焦平面器件的结构形成、参数设计以及信号噪声的分析,研究了制造中的技术难点及解决途径,给出了所研制的64×64元InSb凝视红外焦平面探测器的测试结果并进行了分析。
The structure formation, parameter design and signal noise analysis of InSb staring infrared focal plane device are described. The technical difficulties and solutions in fabrication are also discussed. The testing of 64 × 64 InSb staring infrared focal plane detector The results were analyzed.