Alkali-metal Na Adsorption and Promoted Oxidation on Si(100)2×1 Surface

来源 :Journal of Materials Science & Technology | 被引量 : 0次 | 上传用户:lishashasky
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The alkali-metal Na adsorption on Si(100)2×1 surface and its promoted oxidation and Si oxidegrowth have been investigated by means of thermal desorption,work function,Auger electronspectroscopy and photoemission electron spectroscopy.The experimental data showed that therewas a new state,interface electron state,near the Fermi level after the deposition of Na atoms.It wasfound that the presence of Na always caused an increase of the oxygen initial uptake whereas thepromotion of Si oxide growth was observed only at the coverage of Na greater than 0.5 ML.A newmechanism of Na-promoted Si oxide growth is suggested in this paper. The alkali-metal Na adsorption on Si (100) 2 × 1 surface and its promoted oxidation and Si oxide growth have been investigated by means of thermal desorption, work function, Auger electronspectroscopy and photoemission electron spectroscopy. The experimental data showed that there was a new state , interface electron state, near the Fermi level after the deposition of Na atoms. It was found that the presence of Na always caused an increase of the oxygen initial uptake but the promotion of Si oxide growth was observed only at the coverage of Na greater than 0.5 ML . A new mechanism of Na-promoted Si oxide growth is suggested in this paper.
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