论文部分内容阅读
钼圆片主要用作可控硅的基片。因为硅整流器的品种甚多 ,且规格不一 ,故作为基片的钼圆片规格亦较广 ,其直径一般为 4~ 76.2mm ,厚度为 0 .6~3.0mm。但随着半导体行业的不断迅速发展 ,市场上对大于76.2mm ,如1 0 0mm的钼圆片需求有逐年增加的趋势。我国生产钼片?
Molybdenum wafer is mainly used as a silicon substrate. Because of the many varieties of silicon rectifiers, and different specifications, so as a substrate molybdenum wafer size is also wider, the diameter is generally 4 ~ 76.2mm, a thickness of 0.6 ~ 3.0mm. However, with the continuous rapid development of the semiconductor industry, the market demand for molybdenum wafer larger than 76.2mm, such as 100mm, has been increasing year by year. China’s production of molybdenum film?