1　前言随着新激光装置的开发 ,激光加工技术也取得了巨大进展。 6 0～ 70年代是 YAG激光器与 CO2 激光器的时代 ,主流是金属加工。进入 80年代后 ,准分子激光器登场 ,发展为利用它的短波长对聚合物、瓷器等非金属材料进行精密加工。进入 90年代后 ,飞秒钛蓝宝石激光器进入了加 1 Introduction With the development of new laser devices, laser processing technology has also made great progress. 6 0 ~ 70 years is YAG laser and CO2 laser era, the mainstream is metal processing. Into the 80’s, the excimer laser debut, the development of its use of short-wavelength polymer, porcelain and other non-metallic materials for precision machining. Into the 90’s, the femtosecond titanium sapphire laser into Canada