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研究了热处理对溶胶 -凝胶法制备的TiO2 薄膜材料的晶体结构、致密化以及光学特性的影响 .结果表明TiO2 溶胶颗粒的最低结晶化温度为 40 0℃ ,晶体尺寸随着热处理温度的升高而增大 ;TiO2 薄膜的厚度随着热处理温度的升高从 12 0nm减小到 47nm ,相应的折射率则从 1.85增加到 2 .3;同时 ,TiO2 薄膜的孔洞率随着热处理温度的升高从 0 .2 3降低到 0 .12 2 ,密度则从 2 .83g·cm-3 增加到 3.73g·cm-3 .
The effects of heat treatment on the crystal structure, densification and optical properties of TiO2 thin films prepared by sol-gel method were investigated. The results showed that the lowest crystallization temperature of TiO2 sol particles was 40 0 ℃ and the crystal size increased with the increase of heat treatment temperature The thickness of TiO2 thin film decreases from 12 0nm to 47nm with the increase of heat treatment temperature, and the corresponding refractive index increases from 1.85 to 2.3. Meanwhile, the porosity of TiO2 film increases with the increase of heat treatment temperature From 0.23 to 0.12 2, the density increased from 2.83g · cm-3 to 3.73g · cm-3.