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介绍了红外用光学材料ZnS的性能和制备方法。通过建立CVD法制备ZnS的物理模型,针对流量和压力对沉积过程的影响进行了数值模拟。结果表明,随气体流量的减小,沉积室内气流柱增高,回流区域增大,沉积速率增大且最大值上移。随沉积压力的减小,沉积室内气流柱同样增高,回流区域增大,沉积速率分布逐渐均匀化,但沉积速率整体减小。数值模拟的结果对具体的掌握沉积过程中的影响因素有一定的帮助。
The properties and preparation methods of ZnS for infrared are introduced. The physical model of ZnS was established by CVD, and the influence of flow rate and pressure on the deposition process was numerically simulated. The results show that with the decrease of gas flow rate, the gas column in the deposition chamber increases, the recirculation area increases, and the deposition rate increases and the maximum value increases. With the decrease of sedimentation pressure, the gas flow column in sedimentary chamber also increases, the recirculation area increases, and the deposition rate distribution gradually becomes uniform, but the deposition rate decreases as a whole. The result of numerical simulation is helpful to master the influencing factors in the deposition process.