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报道了248 nm准分子激光微透镜整形均束装置的研制结果。实际采集并拍摄了248 nm准分子激光光能量分布的彩色图像,使用Matlab分析处理该图像并提取了相关信息进行计算,通过光学软件ZEMAX模拟出符合实际准分子激光光能量分布的光源。通过分析空间光能量分布特征,设计并加工出一套适用于248 nm准分子激光的微透镜整形均束装置,且理论模拟和实际测试结果相吻合。248 nm准分子激光通过该光学系统整形均束后,可以在工作平面上得到一个约18 mm×18 mm的正方形光斑,光斑的能量均匀度误差(加工窗)在±2%以内,平顶因子为0.90,光能量通过率为85%左右,解决了248 nm准分子激光光斑形状不规则,且光斑能量分布不均匀的问题。该装置的研制成功,对于优质、高效地开展准分子激光微加工提供了具有自主知识产权的技术支撑。
The development of 248 nm excimer laser microlens beam shaping device was reported. The color image of the energy distribution of 248 nm excimer laser light was acquired and photographed. The image was analyzed by Matlab and the relevant information was extracted for calculation. The light source that meets the actual excimer laser light energy distribution was simulated by optical software ZEMAX. By analyzing the distribution characteristics of spatial light energy, a set of microlens truss beam homogenizer for 248 nm excimer laser was designed and fabricated. The theoretical simulation and experimental results are in good agreement. The 248 nm excimer laser beam is shaped and homogenized by the optical system to obtain a square spot of about 18 mm × 18 mm on the working plane. The energy uniformity error of the spot (processing window) is within ± 2%. The flat top factor Is 0.90, and the light energy passing rate is about 85%, which solves the problem that the 248 nm excimer laser spot shape is irregular and the spot energy distribution is not uniform. The successful development of the device provides the technical support with independent intellectual property rights for the high-quality and efficient excimer laser micro-machining.