在研究高功率激光辐照下激光器腔镜表面热形变分布时通常会忽略其表面镀有的高反射膜系。利用有限元分析软件ANSYS比较了特定激光辐照(吸收功率250W,外环半径4 cm、内环半径2 cm的同轴环形光束,30s)下的高反腔镜在不同夹持方式下的热形变分布,同时考虑了腔镜表面镀有的两种不同高反膜系及膜系中的驻波场的影响,并与通常忽略膜系的情况进行了对比分析。研究表明,采用压圈法时,三种情况下热形变分布的差异相对较小;采用压板法时,三者形变分布产生了明显的差异,镜面中心可能上凸、下凹或者平缓;采用三点法时,尽管镜面中心热形变分布较为平缓,但在环状光束辐照区域内三者仍有明显差异。因此,膜系内驻波场对腔镜热形变分布的影响不能轻易忽略。 In the study of high power laser lasers laser mirror surface thermal deformation distribution is usually ignored when the surface coating of high reflection film system. Using the finite element analysis software ANSYS, we compared the heat of different lasers with different lasers under certain laser irradiation (absorbed power of 250W, outer ring radius of 4 cm, coaxial ring beam of inner radius of 2 cm, 30s) The influence of the standing wave field in two different high antireflective films and film systems coated on the surface of the endoscope was considered and compared with the case where the film systems were usually neglected. The results show that the difference of thermal deformation distribution is relatively small in the three cases when the pressure ring method is adopted. When using the pressure plate method, the deformation distribution of the three has a significant difference, the center of the mirror surface may convex, concave or gentle; Point method, although the center of the mirror thermal deformation is relatively flat, but there are still significant differences in the annular beam irradiation of the three areas. Therefore, the influence of the standing wave field in the film system on the distribution of thermal deformation of the cavity mirror can not be ignored easily.