研究了CVD法制备硅改性铝化物涂层工艺。结果表明,采用先渗硅后渗铝的两步法工艺可在Inconel 718表面获得铝-硅涂层。铝-硅涂层分为明显的两层结构,内层富硅,外层富铝。硅的加入阻碍高温条件下Al原子的内扩散,并促进了试样表面Al2O3膜的生成。铝-硅涂层具有比单一的铝化物涂层更为优秀的耐高温氧化性能。 The CVD process of silicon modified aluminide coating was studied. The results show that the aluminum-silicon coating can be obtained on the surface of Inconel 718 by the two-step process of aluminizing first and then aluminizing. Aluminum - silicon coating is divided into two distinct layers, the inner silicon-rich, outer aluminum-rich. The addition of silicon hinders the diffusion of Al atoms under high temperature and promotes the formation of Al2O3 film on the surface of the sample. Aluminum-silicon coatings have better high temperature oxidation resistance than single aluminum coatings.