提出了一种基于光子晶体波导(PCW),具有超低片内反射、多模干涉型(MMI)光功分器结构。通过在传统MMI型功分器的基础上引入双梯形波导结构,降低了原有功分器由于端口反射以及谐振模反射所带来的片内反射问题。相比于传统的MMI型光功分器,该结构片内反射降低了60%。 A novel structure based on photonic crystal waveguide (PCW) with ultra-low on-chip internal reflection and multimode interference (MMI) optical splitter is proposed. By introducing a double trapezoidal waveguide structure based on the traditional MMI type splitter, the problem of intra-chip reflection caused by the port reflections and the resonant mode reflections of the original splitters is reduced. Compared with the traditional MMI optical splitter, the structure of the chip reflection is reduced by 60%.