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掠射X射线荧光分析技术是实验室分析薄膜特性的一种重要工具。文章简述了利用掠出射X射线荧光技术分析薄膜厚度的原理和方法,介绍了一种可在实验室里实现薄膜特性测试的掠发射X射线荧光分析装置,该装置采用波长色散方式结合超薄窗流气正比计数管,可实现对轻元素的探测。最后从理论上计算了Si片上不同厚度的几种单层薄膜的X射线荧光强度和掠出射角的依赖关系。证明了掠发射X射线荧光分析是一种精确的分析薄膜厚度等特性的方法。
Glancing X-ray fluorescence analysis is an important tool for laboratory analysis of film properties. In this paper, the principle and method of analyzing the thickness of thin films by swept out X - ray fluorescence are briefly introduced. A grazing - emission X - ray fluorescence analyzer which can test the properties of thin films in the laboratory is introduced. The device uses the wavelength dispersion method combined with the ultrathin Window flow proportional counter tube, enabling the detection of light elements. Finally, the dependence of the X-ray fluorescence intensity and the sweep angle of several single-layer thin films with different thicknesses on Si wafers was theoretically calculated. It is proved that the grazing-emission X-ray fluorescence analysis is a precise method to analyze the characteristics of the film thickness.