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提出了一种共光路外差干涉测量模拟磁头磁盘静态间隙的方法,该方法以低频差横向塞曼双频激光器作为光源,采用专门设计的双折射透镜分光和相位测量技术,实现了对光波半波长的3600细分,从而使测量分辨率达到0.1 nm。原理实验结果表明,该系统在无恒温的普通实验室条件下,1 h内稳定测量实验结果漂移小于4 nm;利用压电陶瓷(PZT)微动工作台(步进分辨率1 nm)驱动反射镜(模拟磁头)产生位移,在1μm范围内与该系统测量结果进行比对,得到线性相关系数优于0.9998。
A method of measuring the static gap of magnetic head disk with co-optical path heterodyne interferometry is proposed. The method uses the low frequency difference transverse Zeeman dual-frequency laser as the light source, and adopts the specially designed birefringent lens spectroscopy and phase measurement technology to realize the optical half- 3600 sub-wavelength, so that the measurement resolution of 0.1 nm. The experimental results show that the experimental drift of the system is less than 4 nm within 1 h under normal laboratory conditions without constant temperature. The PZT fretting table (with a step resolution of 1 nm) drives the reflection Mirror (analog head) displacement, in the 1μm range with the system measurements were compared, the linear correlation coefficient better than 0.9998.