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组成电真空器件的金属零件在机加等过程中表面要沾污到一些油污,如果零件没有得到有效的去油清洗,带有残留污染物的零件装配到高真空环境中,可能成为大量气体和蒸气的来源,影响器件的真空度和使用寿命。结合零件表面油污种类、特性,对两种去油方法进行对比:通过洁净度测试、真空热处理和XPS表面残留分析测试结果,说明含活性剂成分的水基清洗液对表面沾污皂化油和非皂化油类的零件清洗效果好,安全无残留,适合高要求的电真空金属零件的去油清洗。
The metal parts that make up the vacuum device are contaminated with some oil on the surface during machining. If the part is not effectively degreased and cleaned, the parts with the residual contaminants are assembled into a high vacuum atmosphere and may become a large amount of gas and The source of the vapor, affecting the vacuum degree and service life of the device. Combining the types and characteristics of the oil on the surface of the parts, the two oil-removing methods are compared. The results of the cleaning test, the vacuum heat treatment and the XPS residual surface analysis show that the water-based cleaning solution containing the active agent has a good effect on the surface saponified oil and non- Saponified oil parts cleaning effect is good, safe, no residue, suitable for demanding electrical vacuum metal parts to the oil cleaning.