一、传感器的发展趋势 八十年代以来,国际上出现了“传感器热”,日本把传感器技术曾列为八十年代十大技术之首,美国把传感器技术列为九十年代关键技术之一。全球现有约6000个传感器公司,开发的传感器品种约2万余种。当前传感器技术的发展趋势表现在以下几个方面。 (1)多功能化 传感器的多功能化是指一个传感器能检测两个或两个以上物理参数或化学参数。 (2)集成化 传感器的集成化是直接利用半导体制成单片集成电路传感器,或是将分立的小型传感器制作在硅片上,如集成化温度、湿度、压力传感器以及霍尔电路等。 I. Development Trend of Sensors Since the 1980s, there has been “sensor fever” in the world. Japan has ranked sensor technology among the top ten technologies of the 1980s. The United States has listed sensor technology as one of the key technologies of the 1990s. There are about 6000 sensor companies in the world and about 20,000 varieties of sensors developed. The current trend of sensor technology performance in the following areas. (1) Multifunctional sensors Multifunctional means that one sensor can detect two or more physical or chemical parameters. (2) The integration of the integrated sensor is to make the monolithic IC sensor directly from the semiconductor, or to make the discrete small sensor on the silicon, such as integrated temperature, humidity, pressure sensor and Hall circuit.