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本文研究在半导体器件生产过程中,用激光“清洗”代替常规的化学清洗的可能性;介绍了激光“清洗”的实验方法和初步结果,从而看出激光在半导体上应用的前景.
This paper studies the possibility of using laser “cleaning” instead of conventional chemical cleaning in the production of semiconductor devices. The experimental and preliminary results of laser “cleaning” are introduced, and the prospect of laser application on semiconductors is also shown.