论文部分内容阅读
讨论了深蚀刻连续浮雕位相微光学元件的衍射特性．给出了槽形与衍射效率关系的初步研究结果．对实际制作具有指导意义．
The diffraction characteristics of deep etching continuous relief phase micro-optical elements are discussed. The preliminary results of the relationship between groove shape and diffraction efficiency are given. The actual production of a guide.