Ordered mesoporous carbon (OMCs) FDU-15 was synthesized through an EISA (Evaporation-Induced Self-Assembly) method, and the oxidized OMCs (FDU-15-COOH) were obtained by subsequent oxidation treatments in liquid phase to introduce functional groups. The samples were characterized by XRD, TEM, FT-IR and nitrogen adsorption-desorption test. The low humidity sensing performances of FDU-15 and FDU-15-COOH thinfilms were investigated by using a quartz crystal microbalance (QCM) transducer. The responses of FDU-15-COOH is higher than that of the pristine FDU-15 at very low humidity (<729 ppmv) with high long-term stability, implying that FDU-15-COOH is a good candidate for low humidity QCM sensor.