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结合多年热场使用经验和计算机模拟技术分析了在热场结构中影响能耗的主要因素,并提出了降低能耗的有效措施,其中包括使用热屏、紧凑的热场结构及使用低热导率的保温材料。使用小口径热屏对降低能耗有显著的效果。改进热场结构:减小加热器与石墨坩埚的间距或减小加热器与保温层的间距都能有效降低直拉硅单晶生长能耗。分析了温场中其他热量的损失,提出了包括减少热场部件与炉体直连,选用低热导率的保温材料的方法可以有效降低能耗。
Combining with many years experience of thermal field and computer simulation technology, the main factors that affect energy consumption in thermal field structure are analyzed and some effective measures to reduce energy consumption are proposed, including the use of thermal screen, compact thermal field structure and the use of low thermal conductivity Insulation materials. The use of small calorimeters has a significant effect on reducing energy consumption. Improve the thermal field structure: reduce the heater and graphite crucible spacing or reduce the heater and the insulation layer spacing can effectively reduce the Czochralski silicon crystal growth energy consumption. The loss of other heat in the temperature field is analyzed. The method of reducing the thermal field components directly connected with the furnace body and selecting the thermal insulation material with low thermal conductivity can reduce the energy consumption effectively.