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采用溶胶-凝胶法(sol-gel)制备技术制作了Pb(Zr,Ti)O3(PZT)压电薄膜,并以PZT薄膜为驱动制作了微泵。采用了V型微阀的微泵主要利用PZT的压电效应。针对微泵的关键结构——复合驱动膜,探索了一种Si/SiO2/Ti/Au/PZT/Cr/Au多层驱动膜结构制备方法,解决了在硅基底上制备PZT薄膜的问题,同时探讨并解决了硅各向异性刻蚀微泵的微驱动腔、单向阀的工艺问题,并通过SEM照片对V型阀和多层驱动膜进行了表征。研究结果表明,采用MEMS技术成功地完成了微驱动器的研制,得到的驱动腔硅杯平坦均匀。在V型阀微泵整体设计中需要的硅片数目少,降低了器件的复杂性,可以满足功耗低、小型化和批量生产的要求。
A Pb (Zr, Ti) O3 (PZT) piezoelectric thin film was fabricated by sol-gel technique and a micropump was fabricated with PZT thin film as the driving force. V-type micro-valve using the main pump PZT piezoelectric effect. Aiming at the key structure of micro-pump-composite driving membrane, a method of preparing a multi-layer driving film structure of Si / SiO2 / Ti / Au / PZT / Cr / Au was explored to solve the problem of preparing PZT film on a silicon substrate, This paper discusses and solves the process problems of micro-drive chamber and check valve of silicon anisotropic etching micro-pump, and characterizes V-valve and multi-layer driving membrane through SEM photographs. The research results show that the micro-actuator has been successfully fabricated by using MEMS technology, and the resulting silicon cup of the driving cavity is even and flat. The small number of silicon wafers required in the V-valve micro-pump overall design reduces the complexity of the device and meets the requirements of low power consumption, miniaturization and mass production.