以InP/InGaAsP脊形波导结构为研究对象,采用有限元算法(FEM),系统地仿真分析了在固定芯层厚度的情况下,不同脊高和脊宽条件下脊形波导的单模特性和偏振特性。在芯层厚度一定的情况下,脊宽越窄,刻蚀深度越浅,波导的传输模式越接近单模。在深刻蚀情况下,脊波导模双折射系数受到脊宽的影响较大,波导的偏振不敏感性较差;在浅刻蚀情况下,模双折射系数(Δn=nTE-nTM)受到脊宽和脊高的影响较为微弱,稳定在1.2×10-3。相关仿真和分析为基于InP/InGaAsP脊波导的光电子器件的结构设计提供了一定的理论支持。 Taking the InP / InGaAsP ridge waveguide structure as the research object, the finite element method (FEM) is used to systematically simulate and analyze the single-mode characteristics of ridge waveguide with different ridge height and ridge width under the condition of fixed core thickness and Polarization characteristics. In the case of a certain core thickness, the narrower the ridge width, the shallower the etching depth, the closer the transmission mode of the waveguide is to the single mode. In the case of deep etching, the birefringence coefficient of ridge waveguide mode is greatly affected by the ridge width, and the polarization insensitivity of the waveguide is poor. In shallow etching, the mode birefringence coefficient (Δn = nTE-nTM) And the effect of ridge height is relatively weak, stable at 1.2 × 10-3. The related simulation and analysis provide theoretical support for the structural design of optoelectronic devices based on InP / InGaAsP ridge waveguide.