微机电系统(MEMS)惯性传感器在车辆领域的应用有导航辅助、检测冲击、检测由牵引力损失所造成的翻滚与偏移。惯性传感器包括线性加速度测量,转动行为测量,如偏移、翻滚、纵摇,也包括压力传感器测试高度。在消费领域,惯性传感器已经应用在游戏机、智能手机、无人机、照相机、虚拟现实头盔和其他器件;阐述了各类型应用于汽车领域和消费领域的MEMS惯性传感器的生产、测试和封装。 MEMS inertial sensors are used in the vehicle area for navigation aids to detect impacts and to detect rollover and offset caused by traction losses. Inertial sensors include linear acceleration measurements, rotational behavior measurements such as offset, roll, pitch, and pressure sensor test height. In the consumer area, inertial sensors have been used in game consoles, smartphones, drone, cameras, virtual reality helmets, and other devices; they cover the production, testing and packaging of various types of MEMS inertial sensors used in the automotive and consumer sectors.