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建立了电子束抽运下 ,Ar+ 2 离子准分子的反应动力学模型。给出了与电子束能量沉积和Ar+ 2 离子准分子形成有关的反应过程。建立了反应速率方程组 ,并对该方程组进行了数值求解 ,得到了Ar+ 2 离子准分子的粒子数密度随时间的演变情况。根据粒子数密度的计算结果 ,求解了小信号增益系数 ,并将该理论计算结果与实验结果进行了比较。理论和实验结果的吻合 ,表明氩第三谱带中中心位于 2 40nm的谱区可能来源于Ar+ 2 离子准分子的跃迁。
The reaction kinetic model of Ar + 2 ion excimer was established under electron beam pumping. The reaction processes related to electron beam energy deposition and Ar + 2 ion excimer formation are given. The reaction rate equations were established and the equations were numerically solved. The evolution of the population density of Ar + 2 ions with time was obtained. According to the calculation results of particle number density, the small signal gain coefficient was solved, and the theoretical calculation results were compared with the experimental results. The agreement between the theoretical and experimental results indicates that the band centered at 240 nm in the third argon band may originate from the transition of the Ar + 2 ion excimer.