对激光刻蚀过程中的气化现象进行了热力学分析,根据不同的材质合理地选取工作条件,进行了激光狭缝刻制、太阳电池硅片打孔及激光标识的试验,并对刻蚀结果进行了对比分析,得出与理论分析相符的结果。 The gasification phenomenon in the laser etching process was analyzed by thermodynamics. The working conditions were selected according to different materials. Laser slit engraving, solar cell drilling and laser marking were carried out. The etching results Conducted a comparative analysis of the results obtained with the theoretical analysis.