论文部分内容阅读
576位二极管矩阵的全套掩模版是用自行设计试制的光束布线机制作的。该机主要是为中、大规模集成电路在成品率不能保证100%的情况下选择布线服务的。但用它来制作这种版数多、矩阵形式的一次掩模版显示了极大的优越性,精度和质量皆满足工艺要求。下面简要介绍光束布线机的结构、制版原理、用它来制作规则性强的一次掩模版的优越性及其有关的问题。
The full set of reticle for the 576-bit diode matrix is made using a beam routing machine designed and manufactured by ourselves. The aircraft is mainly for large and medium scale integrated circuits in the finished product yield can not be guaranteed 100% of the case of routing services. But using it to make such a large number of plates, a reticle in the form of a matrix shows great superiority, both in accuracy and in quality, to meet the process requirements. The following brief introduction to the structure of the beam routing machine, plate principle, use it to make a rule of the advantages of a reticle and its related issues.