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通过分析MEMS电容式并联开关的工作原理,设计并制作出一款适合Ka波段分布式MEMS移相器的电容式开关。通过理论计算和经验选取,初步得到了MEMS电容式并联开关的结构尺寸。采用HFSS软件建立了开关的三维电磁场模型并优化了关键结构参数。仿真表明开关在Ka波段插入损耗小于0.15dB,回波损耗大于15dB。采用CoventorWare软件进行了开关的机电耦合仿真,得出其驱动电压为2.1V。为了满足流片单位的实际工艺约束条件,对开关的设计版图和微加工工艺进行了多轮改进,研制成功MEMS电容式并联开关工艺样品。开关动态特性测试表明,在驱动电压36V时,桥下拉的高度约为2μm。
By analyzing the working principle of MEMS capacitive parallel switch, a capacitive switch suitable for Ka-band distributed MEMS phase shifter is designed and fabricated. Through the theoretical calculation and experience selection, initially MEMS capacitive parallel switch structure size. HFSS software was used to establish the three-dimensional electromagnetic field model of switch and optimize the key structural parameters. The simulation shows that the insertion loss of the switch in the Ka band is less than 0.15dB and the return loss is greater than 15dB. Using CoventorWare software to conduct the switch electromechanical coupling simulation, draw its driving voltage of 2.1V. In order to meet the actual process constraints of the film unit, several improvements were made to the design layout and micro-fabrication process of the switch to develop a MEMS capacitive parallel switch process sample. Switch dynamic characteristics of the test showed that the drive voltage 36V, the bridge pull the height of about 2μm.