采用将有限体积法求解三维层流传热方程获得的温度场耦合到ANSYS进行热变形分析的方法,研究了流道截面形状和尺寸对微通道水冷镜内传热现象和镜面热畸变的影响。计算了矩形、梯形、圆形3种截面形状以及3种不同水力直径(百微米量级)下微通道水冷镜的平均换热系数、温升和镜面热变形。结果表明,同一条流道,各壁面温度并不随激光辐照面和镜面呈对称分布,最高温度偏向下游;侧壁的换热系数最大,且沿水流方向逐步减小;流道距进水口距离越大,其换热系数越小。在3种截面形状微通道中,减小截面尺寸可获得较大换热系数,且梯形截面微通道水冷镜能获得最小的镜面热变形量,在热流密度为14730 W/m2,水力直径为239μm,入口速度为2.54m/s的条件下,其镜面热变形仅为0.016μm。 The finite volume method was used to couple the temperature field obtained from the three-dimensional laminar heat transfer equation to the thermal deformation analysis of ANSYS. The influence of cross-sectional shape and size of the flow channel on heat transfer and mirror thermal distortion in microchannels was studied. The average heat transfer coefficient, temperature rise and specular thermal deformation of the microchannel water-cooled mirrors with rectangular, trapezoidal and circular sections and three different hydraulic diameters (one hundred micrometers) were calculated. The results show that the temperature of each wall in the same channel is not symmetrical with the laser irradiation surface and the mirror surface, and the maximum temperature tends to the downstream. The heat transfer coefficient of the sidewall is the largest and decreases along the water flow direction. The larger, the smaller the heat transfer coefficient. In the three cross-sectional microchannels, a larger heat transfer coefficient can be obtained by decreasing the cross-sectional dimension, and the minimum mirror thermal deformation can be obtained by the trapezoidal cross-section microchannel water cooling mirrors. At a heat flux density of 14730 W / m2 and a hydraulic diameter of 239 μm , The inlet velocity of 2.54m / s conditions, the mirror thermal deformation of only 0.016μm.