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采用电镀法和磁控溅射法设计了一种电镀增敏铜薄膜和耐海水腐蚀碳薄膜的微型光纤布拉格光栅(FBG)温度传感器。当海水温度范围为0~50℃时,设计的FBG温度增敏传感器的布拉格波长与海水温度呈线性关系,线性系数高达99.99%。温度灵敏度可由电镀时间和电流精确控制。将镀铜薄膜探头、镀铜薄膜和二氧化硅薄膜探头、镀铜薄膜和碳薄膜探头的温度特性和抗海水腐蚀特性作对比。结果表明,传感器的温度灵敏度系数随铜薄膜层厚度呈指数增长,铜薄膜层厚度随电镀时间呈线性增长,碳薄膜层的类金刚石结构可抑制增敏铜薄膜层在海水中的腐蚀。
A miniature fiber Bragg grating (FBG) temperature sensor with electroplating sensitized copper film and seawater resistant carbon film was designed by electroplating method and magnetron sputtering method. When the seawater temperature range is 0 ~ 50 ℃, the wavelength of the Bragg wavelength of the designed FBG temperature sensitization sensor has a linear relationship with the seawater temperature, with a linear coefficient of up to 99.99%. Temperature sensitivity can be precisely controlled by plating time and current. Compare the temperature characteristics of copper plated film probes, copper plated and silica film probes, copper plated and carbon film probes to seawater corrosion resistance. The results show that the temperature sensitivity coefficient of sensor increases exponentially with the thickness of copper thin film, and the thickness of copper thin film increases linearly with plating time. The diamond - like carbon film can restrain the corrosion of copper thin film in seawater.