论文部分内容阅读
提出了一种新型钕铁硼永磁微机器人的制备方案及其“振动–黏滑”运动控制算法.介绍了基于MEMS(微机电系统)技术的图形化光刻法制备永磁微机器人的工艺流程.设计了运动控制驱动线圈系统,并确定了系统空间几何中心处2.5cm见方的均匀磁场强度工作区域.介绍了用于线圈驱动的嵌入式系统的整体设计方案.建立了微机器人的运动模型,然后对“振动–黏滑”运动模式进行了数学仿真,通过实验验证了微机器人的直线2维运动.结果表明,上述无缆驱动微机器人可达10mm/s的平均直线运动速度.
A new type of NdFeB permanent magnet micro robot’s preparation scheme and its “vibration-stick-slip” motion control algorithm are presented. The fabrication of permanent magnet micro robot based on MEMS (Micro Electro Mechanical System) The design of a motion control drive coil system and to determine the system geometry of the geometric center 2.5cm square uniform magnetic field work area is introduced for coil-driven embedded system design as a whole.Micro-robot Motion model and then simulate the “vibration-stick-slip” motion mode, and verify the linear two-dimensional motion of micro-robot experimentally.The results show that the above-mentioned cableless micro-robot can reach an average linear motion of 10mm / s speed.