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介绍了XPS(X-rayphotoelectronspectroscopy)谱图中本底产生的机理以及Tougaard法本底扣除原理的简略推导过程,提出了可供编程的约化形式,使用VC语言编写程序试对不同样品(含金属、过渡金属及非金属)的谱图进行本底扣除,并与Shirley法、直线法本底扣除进行准确性的比较,提出了Tougaard方法试用于非金属粉末化合物样品的测试分析结果.
The mechanism of background generation in XPS (raphotoelectronspectroscopy) spectra and the derivation of the deduction principle of Tougaard method are introduced. Reduced forms are available for programming. VC programs are used to program different samples , Transition metal and nonmetal) were subtracted and compared with Shirley’s method and the straight-line method. The results of the test of the Tougaard method on non-metallic powder compounds were proposed.