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为得到空间光学元件超光滑表面,对超精密气囊抛光方法的去除特性进行了理论和实验研究。以Preston方程为基础,应用运动学原理建立了气囊抛光“进动”运动的材料去除模型,针对抛光气囊工具的物理特性,按照Hertz接触理论对去除模型进行了修正;利用计算机仿真的方法,分析了几个主要工艺参数对“进动”抛光运动去除特性的影响规律,并在超精密光学数控抛光机上进行了正交实验;仿真和实验结果吻合较好,总结得到4点气囊抛光方法中重要的结论,给出了“进动”角与压缩量的取值范围,以此得到了面型精度RMS值为0.024λ(λ=0.6328μm)的超光滑表面,为开展光学元件气囊抛光工艺研究提供依据。
In order to obtain the ultra-smooth surface of the space optical element, theoretical and experimental studies on the removal characteristics of the ultra-precision airbag polishing method are carried out. Based on the Preston equation, a material removal model of airbag polishing and “precession” motion was established based on the kinematics principle. According to the physical characteristics of the airbag tool, the removal model was modified according to Hertz contact theory. By using computer simulation , The influence of several main process parameters on the removal characteristics of the “precession” polishing motion was analyzed. The orthogonal experiment was carried out on the ultra-precision optical CNC polishing machine. The simulation and the experimental results were in good agreement. The important conclusion of the polishing method is that the range of the “precession” angle and the amount of compression is given, and the super-smooth surface with RMS RMS of 0.024λ (λ = 0.6328μm) is obtained. Optical components to provide a basis for the research of airbag polishing technology.