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光电子发射产额谱仪(PYS)是高灵敏度和高能量分辨率的表面分析仪器,能够探测半导体带隙和价带顶附近精细电子态,直接提供此处满表面态的分布形状和精确测量功函数等半导体重要参量。总之,PYS提供了新的信息,尤其作为半导体表面特性研究是个非常有效的手段,是其它光电子发射谱仪UPS和XPS不能比拟的。虽然其探测能量范围很窄(3.7～6.6eV),但这是半导休表面研究感兴趣的区间。PYS基本原理是依赖于Spicer提出的光发射三阶段模型,表征表面电子结构的态密度可用光发射产额(每个入射光子激发出的电子数)对光子能量的导数来描述。PYS结构主要由光学系统,光电子收集器,脉冲计数系统,计算机控制系统和超高真空系统五个部分组成,根据我们正在研制的PYS仪器,对此进行扼要的介绍.
The photoemission yield spectrometer (PYS) is a high-sensitivity and high-energy surface analysis instrument capable of detecting the semiconductor band gap and the fine electron states near the top of the valence band, directly providing the distribution of the full surface state and the precise measurement of work Function and other important semiconductor parameters. In summary, PYS provides new information, especially as a very effective method for studying the surface properties of semiconductors, which is unmatched by other photoemission spectrometers UPS and XPS. Although its range of probing energies is very narrow (3.7-6.6 eV), this is an area of interest for semiconductor surface studies. The basic principle of PYS relies on the three-phase model of light emission proposed by Spicer. The density of states that characterize surface electronic structures can be described by a derivative of photon energy using the photoemission yield (the number of electrons excited by each incident photon). PYS structure is mainly composed of optical system, optoelectronic collector, pulse counting system, computer control system and ultra-high vacuum system composed of five parts, according to the PYS instrument we are developing, this is a brief introduction.