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本文介绍了光学显微轮廓仪中干涉图象的数据采集、条纹扫描实时处理系统,在APPLE—Ⅱ微机控制下进行表面轮廓各种粗糙度参数的计算,实现了对薄膜元件、磁带等表面微观形貌的非接触式测量。
In this paper, the data acquisition and stripe scanning real-time processing system of the interferometric image in the optical micro-profiler are introduced. The roughness parameters of the surface profile are calculated under the control of APPLE-Ⅱ microcomputer. Topography of the non-contact measurement.