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采用多弧离子镀技术在304不锈钢和单晶硅片上沉积Cr CN涂层,通过改变乙炔流量(20~60 sccm)来控制涂层中的碳含量,利用SEM、XRD、XPS、纳米压痕仪、划痕测试仪及摩擦磨损试验对涂层的微观结构及性能进行了对比研究,分析了不同碳元素的含量对涂层组成及性能的影响。结果表明,随着碳含量的增加,各衍射峰整体呈现出下降趋势,涂层由晶态向非晶态转变,化学成分出现明显变化;当乙炔流量为40 sccm时,硬度、弹性模量和结合力达到最高,分别为25 GPa、345 GPa及77 N。与此同时,随着乙炔流量的增加,涂层的摩擦因数及磨损率呈现出先递减后递增的趋势,在乙炔流量为40 sccm时达到最低,涂层表现出较优异的摩擦学性能。
The CrCN coating was deposited on 304 stainless steel and monocrystalline silicon wafers by multi-arc ion plating. The carbon content in the coating was controlled by changing the flow rate of acetylene (20-60 sccm). SEM, XRD, XPS, Instrument, scratch tester and friction and wear test of the microstructure and properties of the coating were compared and analyzed the different carbon content of the composition and properties of the coating. The results show that with the increase of carbon content, the diffraction peaks show a decreasing trend as a whole. The coating changes from crystalline to amorphous, and the chemical composition changes obviously. When the acetylene flow rate is 40 sccm, the hardness, elastic modulus and The highest binding power was 25 GPa, 345 GPa and 77 N, respectively. At the same time, with the increase of acetylene flow rate, the friction coefficient and wear rate of the coating tend to decrease first and then increase, reaching the lowest when the flow rate of acetylene is 40 sccm, and the coating shows more excellent tribological properties.