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采用XPS方法研究了TiMeXN多元膜内各元素的化学状态 ,结果表明 ,添加元素改变了TiN中Ti元素特征峰的位置和形状。首先 ,使Ti、N峰强度增大 ,O峰强度减弱 ;其次 ,使Ti2p1 / 2 峰、Ti2p3 / 2 峰和N 1s的双峰现象基本消失 ,氮化物薄膜中Ti的化学状态基本趋于一致 ;再次 ,随着微量元素总含量的增高 ,Ti2p峰的多重分裂值减小 ,直至使Ti2p1 / 2 峰和Ti2p3 / 2 峰部分重迭。在多元膜中 ,微量添加元素本身以“正离子”或“负离子”的形式存在 ,形成微量第二相
The chemical state of each element in the TiMeXN multilayers was studied by XPS method. The results showed that the addition of elements changed the position and shape of the Ti peak in TiN. Firstly, the intensity of Ti and N peaks increased and the intensity of O peak decreased. Secondly, the bimodal phenomena of Ti2p1 / 2 peak, Ti2p3 / 2 peak and N 1s almost disappeared, and the chemical state of Ti in the nitride film basically became the same ; Again, with the increase of the total content of trace elements, the multi-split value of Ti2p peak decreased until the Ti2p1 / 2 peak and Ti2p3 / 2 peak overlap partially. In a multi-membered film, the trace addition element itself exists in the form of “positive ions” or “negative ions” to form a minute second phase