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采用甲基三乙氧基硅烷(MTES)通过溶胶-凝胶法制备了憎水性Si O2膜并进行了气体分离实验.实验结果表明,随着MTES的加入,接触角从32.76°增大到改性后的98.16°,在潮湿空气中放置90天,膜的憎水性仍能够保持;MTES/TEOS=0.8时,薄膜的憎水性可以保持到400℃.气体渗透实验表明,在0.1 MPa下,循环焙烧3次后N2的渗透通量为0.44×10-7mol.m-2.Pa-1.s-1,CO2的渗透通量为0.45×10-7mol.m-2.Pa-1.s-1,H2的渗透通量为1.90×10-7mol.m-2.Pa-1.s-1.H2/N2的分离因子为4.32,H2/CO2的分离因子为4.22,焙烧3次后气体渗透已经有了超越努森扩散机理的趋势,膜孔结构比较稳定,所制Si O2膜具有较好的耐水汽性能.
Hydrophobic Si O2 membranes were prepared by sol-gel method using methyltriethoxysilane (MTES) and gas separation experiments were carried out.The experimental results show that with the addition of MTES, the contact angle increases from 32.76 ° to After 98.16 °, the water repellency of the membrane was maintained for 90 days in humid air. The hydrophobicity of the membrane was maintained at 400 ℃ when MTES / TEOS = 0.8. Gas permeation experiments showed that under 0.1 MPa, After 3 times of roasting, the permeation flux of N2 was 0.44 × 10-7mol.m-2.Pa-1.s-1, the permeation flux of CO2 was 0.45 × 10-7mol.m-2.Pa-1.s- 1, H2 permeation flux of 1.90 × 10-7mol.m-2.Pa-1.s-1.H2 / N2 separation factor of 4.32, H2 / CO2 separation factor of 4.22, after three times of roasting gas permeation There has been a trend beyond the Knudsen diffusion mechanism, membrane pore structure is relatively stable, the prepared Si O2 film has good water vapor resistance.