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利用压电陶瓷的特性 ,采用IC兼容的技术 ,设计并制造了一种新颖的压电薄膜微型陀螺 .在Pt/Ti/SiO2 /Si基底上以sol gel技术铺设了高质量的压电陶瓷薄膜 .基于压电反效应 ,微型陀螺在其谐振频率上被 0 .3V的交流信号驱动 .由其压电正效应 ,可检测到与转动角速度成正比的输出信号 .本文介绍了该微型陀螺的设计原理 .实验结果证实了理论预测 .
Based on the characteristics of piezoelectric ceramics, a novel piezoelectric thin film micro gyroscope is designed and fabricated by using IC-compatible technology.The high quality piezoelectric thin film is deposited on Pt / Ti / SiO2 / Si substrate by sol gel technique Based on the piezoelectric inverse effect, the micro-gyroscope is driven by the AC signal of 0.3V at its resonant frequency, and the output signal proportional to the rotational angular velocity can be detected by its piezoelectric positive effect.This paper introduces the design of the micro-gyro The experimental results confirm the theoretical prediction.