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为实现高回转精度微柱状电极的精确高效在线制备,对微电极电化学刻蚀过程进行了深入的研究与改进。首先,根据电化学刻蚀原理,分析了电极旋转对柱状电极加工的影响,试验证明电极旋转可以提高电极的回转精度;其次,根据试验归纳,确立了加工电压、浸液深度和电极转速之间的函数关系,建立了高回转精度微柱状电极加工控制数学模型;最后,在上述模型的指导下,选择优化的加工参数组合,成功加工得到一系列直径为100μm左右、同轴度误差小于1μm的柱状电极。
In order to realize the accurate and efficient on-line preparation of microrod electrodes with high gyration precision, the electrochemical etching process of microrods has been deeply studied and improved. Firstly, according to the principle of electrochemical etching, the influence of electrode rotation on the processing of columnar electrode was analyzed. It was proved that electrode rotation could improve the rotation accuracy of the electrode. Secondly, according to the experimental conclusion, the relationship between processing voltage, immersion depth and electrode speed Finally, under the guidance of the above model, an optimized combination of machining parameters is selected, and a series of machining parameters with a diameter of about 100 μm and a concentricity error of less than 1 μm Columnar electrode.