一前言目前,我国用三氯氢硅氢还原法生产的半导体用高纯多晶硅在质量上已基本能满足电子工业的要求。去年开始还出口几十吨。但是生产成本仍较高,各厂之间的差距也较大。多晶硅是一种高能耗产品,在成本构成中,电能和三氯氢硅单耗所占比重最大。我厂80年分别为29.8％和27.9％,两项合计57.7％。由此可见,节能和提高三氯氢硅利用率是降 A foreword At present, China’s use of hydrogen trichlorosilane hydrogen reduction of semiconductors used in the production of high-purity polysilicon has basically been able to meet the requirements of the electronics industry. Last year also exported dozens of tons. However, the production cost is still high, and the gap between the plants is also large. Polysilicon is a high-energy-consuming product with the largest share of electricity and trichlorosilane consumption in terms of cost. I plant 80 years respectively 29.8% and 27.9%, two total 57.7%. As can be seen, energy saving and improvement in the utilization of trichlorosilane are declining