通过实例研究和近期报道的文献,论述了热驱动微光学的研究进展。驱动器主要通过应用在液体和液气界面的压力来调控光学微流体,包括微镜片和薄膜微透镜,热驱动器利用芯片上的温度变化产生所需要的压力差,从而对微透镜进行调控。同时还讨论了用于微光学结构的各种设备、结构、液体和膜材料,并提供了典型操作特性。 Through case studies and recent reports, the research progress of thermo-actuated micro-optics is discussed. The driver regulates optical microfluidics mainly through the pressures applied at the liquid and liquid-gas interfaces, including the micromirrors and the thin film microlenses. The heat driver utilizes the temperature differential across the chip to create the required pressure differential to regulate the microlenses. Various devices, structures, fluids, and membrane materials for micro-optical structures are also discussed and provide typical operating characteristics.